Department Elektrotechnik-Elektronik-Informationstechnik (EEI)

Evaluation of Ultrasonic Sensor Signals Using Fuzzy Logic (1996) Vossiek M, Eccardt P, Magori V Book chapter / Article in edited volumes Tetramethoxysilane as a precursor for focused ion beam and electron beam assisted insulator (SiOx) deposition (1996) Lipp S, Frey L, Lehrer C, Frank B, Demm E, Pauthner S, Ryssel H Journal article, Original article Reduction of lateral parasitic current flow by buried recombination layers formed by high energy implantation of C or O into silicon (1996) Bogen S, Herden M, Frey L, Ryssel H Conference contribution, Conference Contribution Investigations on the topology of structures milled and etched by focused ion beams (1996) Lipp S, Frey L, Lehrer C, Frank B, Demm E, Ryssel H Journal article, Original article Deep implants for semiconductor device applications (1996) Frey L, Bogen S, Herden M, Ryssel H Journal article, Original article A multi-laminate wire mesh ionizer for a Cs sputter negative ion source (1996) Jiao G, Bogen S, Frey L, Ryssel H Journal article, Original article A comparison of focused ion beam and electron beam induced deposition processes (1996) Lipp S, Frey L, Lehrer C, Demm E, Pauthner S, Ryssel H Journal article, Original article Modeling of microacoustic mode conversion in arbitrary arrays using an electromagnetic phased arreay concept (1996) Weigel R, Herzinger S, Müller G Conference contribution SAW device testing based on estimation methods (1996) Johnson J, Weigel R Conference contribution Vollwellenanalyse der Ausbreitung mikroakustischer Moden in Schichtstrukturen (1996) Wallner P, Schneider R, Walliser B, Holm A, Roesler U, Ruile W, Weigel R Conference contribution