Lehrstuhl für Elektronische Bauelemente

Investigation of molybdenum contamination in 11B+ and 31P+ implants (2000) Funk K, Häublein V, Chakor H, Ameen M, Frey L, Ryssel H, Ramirez A Conference contribution, Conference Contribution Gate oxide damage due to through the gate implantation in MOS-structures with ultrathin and standard oxides (2000) Jank M, Lemberger M, Frey L, Ryssel H Conference contribution, Conference Contribution Enhanced depth-resolution analysis with medium energy ion scattering (meis) for shallow junction profiling (2000) Tajima J, Park Y, Fujita M, Takai M, Schork R, Frey L, Ryssel H Conference contribution, Conference Contribution Defects and gallium - Contamination during focused ion beam micro machining (2000) Lehrer C, Frey L, Petersen S, Mizutam M, Takai M, Ryssel H Conference contribution, Conference Contribution Field emitter array fabricated using focused ion and electron beam induced reaction (2000) Yavas O, Ochiai C, Takai M, Park Y, Lehrer C, Lipp S, Frey L, et al. Journal article, Original article AFM and STM investigation of carbon nanotubes produced by high energy ion irradiation of graphite (1999) Biró L, Márk G, Gyulai J, Havancsák K, Lipp S, Lehrer C, Frey L, Ryssel H Journal article, Original article MOCVD of ferroelectric thin films (1999) Schmidt C, Lehnert W, Leistner T, Frey L, Ryssel H Conference contribution, Original article Implantation of nitrogen into polysilicon to suppress boron penetration through the gate oxide (1999) Bauer A, Mayer P, Frey L, Haeublein V, Ryssel H Conference contribution, Conference Contribution Forming nitrided gate oxides by nitrogen implantation into the substrate before gate oxidation by RTO (1999) Bauer A, Mayer P, Frey L, Haeublein V, Ryssel H Conference contribution, Conference Contribution Carbon nanotubes produced by high energy (E > 100 MeV), heavy ion irradiation of graphite (1999) Biró L, Szabó B, Márk G, Gyulai J, Havancsák K, Kürti J, Dunlop A, et al. Journal article, Original article