Lehrstuhl für Elektronische Bauelemente

Fabrication of silicon aperture probes for scanning near-field optical microscopy by focused ion beam nano machining (2001) Lehrer C, Frey L, Petersen S, Sulzbach T, Ohlsson O, Dziomba T, Danzebrink H, Ryssel H Journal article, Original article Limitations of focused ion beam nanomachining (2001) Lehrer C, Frey L, Petersen S, Ryssel H Journal article, Original article Electrical reliability aspects of through the gate implanted MOS structures with thin oxides (2001) Jank M, Lemberger M, Bauer A, Frey L, Ryssel H Journal article, Original article Impact of platinum contamination on ferroelectric memories (2001) Boubekeur H, Mikolajick T, Nagel N, Dehm C, Pamler W, Bauer A, Frey L, Ryssel H Conference contribution, Conference Contribution Substrate misorientation as additional parameter for low temperature growth of GaAs (2001) Schür C, Marek T, Strunk HP, Tautz S, Steen C, Kiesel P, Malzer S, et al. Journal article Tungsten, nickel, and molybdenum Schottky diodes with different edge termination (2001) Weiss R, Frey L, Ryssel H Journal article, Original article Barium, strontium and bismuth contamination in CMOS processes (2001) Boubekeur H, Mikolajick T, Höpfner J, Dehm C, Pamler W, Steiner J, Kilian G, et al. Authored book, Volume of book series Aspects of barium contamination in high dielectric dynamic random access memories (2000) Boubekeur H, Höpfner J, Mikolajick T, Dehm C, Frey L, Ryssel H Journal article, Original article Wafer Conserving Full Range Construction Analysis for IC Fabrication and Process Development Based on FIB /Dual Beam Inline Application (2000) Weiland R, Boit C, Dawes N, Dzieslaty A, Demm E, Ebersberger B, Frey L, et al. Conference contribution, Conference Contribution Phosphorus Ion Shower Implantation for special power IC applications (2000) Kröner F, Schork R, Frey L, Burenkov A, Ryssel H Conference contribution, Conference Contribution