Lehrstuhl für Elektronische Bauelemente

Electrical characterization and reliability aspects of zirconium silicate films obtained from novel MOCVD precursors (2004) Lemberger M, Paskaleva A, Zürcher S, Bauer A, Frey L, Ryssel H Journal article, Original article Integration of field emitters into scanning probe microscopy sensors using focused ion and electron beams (2004) Lehrer C, Frey L, Petersen S, Ryssel H, Schäfer M, Sulzbach T Journal article, Original article Modeling of Chemical-Mechanical Polishing on Patterned Wafers as Part of Integrated Topography Process Simulation (2004) Nguyen PH, Lorenz J, Baer E, Ryssel H Conference contribution Optical Characterization of Ferroelectric Strontium-Bismut-Tantalate (SBT) Thin Films (2004) Schmidt C, Petrik P, Schneider C, Fried M, Löhner T, Bársony I, Gyulai J, Ryssel H Journal article Physical and Electrical Properties of Thin High-k HfxTiySizO Film With varying Hf to Ti Ratios (2004) Paskaleva A, Bauer A, Lemberger M, Zürcher S Conference contribution, Conference Contribution Genetic Algorithms to Improve Mask and Illumination Geometries in Lithographic Imaging Systems (2004) Fühner T, Erdmann A, Farkas R, Tollkühn B, Kókai G Conference contribution, Original article Modeling of the influence of Schottky barrier inhomogeneities on SiC diode characteristics (2004) Weiss R, Frey L, Ryssel H Authored book, Volume of book series Investigation of rapid thermal annealed pn-junctions in SiC (2004) Frey L, Rambach M, Weiss R, Bauer A, Ryssel H Authored book, Volume of book series Trench sidewall doping for lateral power devices (2003) Berberich SE, Bauer A, Frey L, Ryssel H Conference contribution, Conference Contribution Influence of Antenna Shape and Resist Patterns on Charging Damage During Ion Implantation (2003) Dirnecker T, Frey L, Bauer A, Ryssel H, Ruf A, Henke D, Beyer A Conference contribution