Lehrstuhl für Elektronische Bauelemente

Simulation of ion beam direct structuring for 3D nanoimprint template fabrication (2006) Lugstein A, Frey L, Bertagnolli E, Platzgummer E, Biedermann A, Langfischer H, Eder-Kapl S, et al. Journal article, Original article Ion implantation and annealing for an efficient N-doping of TiO2 nanotubes (2006) Ghicov A, Macák J, Tsuchiya H, Kunze J, Häublein V, Frey L, Schmuki P Journal article, Original article Extracting activation and compensation ratio from aluminum implanted 4H-SiC by modeling of resistivity measurements (2006) Rambach M, Frey L, Bauer A, Ryssel H Authored book, Volume of book series Untersuchung von Aufladungseffekten bei der Ionenimplantation (2006) Dirnecker T, Ryssel H Authored book Creation of E-Learning Content for Microelectronics Manufacturing (2006) Oechsner R, Pfeffer M, Pfitzner L, Ryssel H, Beer K, Boldin M, de Mey B, et al. Conference contribution Well Design in a Bulk CMOS Technology with Low Mask Count (2006) Jank M, Kandziora C, Frey L, Ryssel H Conference contribution Wafer scale characterization of interface state densities without test structures by photocurrent analysis (2005) Rommel M, Groß M, Frey L, Bauer A, Ryssel H Conference contribution, Conference Contribution Triple trench gate IGBTs (2005) Berberich SE, Bauer A, Frey L, Ryssel H Conference contribution, Conference Contribution Thin HfxTiySixO films with varying Hf to Ti contents as candidates for high-k dielectrics (2005) Bauer A, Paskaleva A, Lemberger M, Frey L, Ryssel H Conference contribution, Conference Contribution High-k Hafnium Silicate Films on Silicon and Germanium Wafers by MOCVD Using a Single-Source Precursor (2005) Lemberger M, Schön F, Dirnecker T, Jank M, Paskaleva A, Bauer A, Frey L, Ryssel H Book chapter / Article in edited volumes