Lehrstuhl für Elektronische Bauelemente

MOCVD of Hafnium Silicate Films Obtained from a Single-Source Precusor on Silicon and Germanium for Gate-Dielectric Applications (2007) Lemberger M, Schön F, Dirnecker T, Jank M, Frey L, Ryssel H, Paskaleva A, et al. Journal article Impurity Conduction in Silicon Carbide (2007) Krieger M, Semmelroth K, Weber HB, Pensl G, Rambach M, Frey L Journal article Active Fuse (2006) Berberich SEB, März M, Beuer S, Ryssel H Conference contribution Nanoscale morphology and photoemission of arsenic implanted germanium films (2006) Peto G, Khanh N, Horvath Z, Molnar G, Gyulai J, Kotai E, Guczi L, Frey L Journal article The impact of mass resolution on molybdenum contamination for B, P, BF 2, and As implantations (2006) Häublein V, Frey L, Ryssel H Conference contribution, Conference Contribution Simulation of ion beam direct structuring for 3D nanoimprint template fabrication (2006) Lugstein A, Frey L, Bertagnolli E, Platzgummer E, Biedermann A, Langfischer H, Eder-Kapl S, et al. Journal article, Original article Ion implantation and annealing for an efficient N-doping of TiO2 nanotubes (2006) Ghicov A, Macák J, Tsuchiya H, Kunze J, Häublein V, Frey L, Schmuki P Journal article, Original article Extracting activation and compensation ratio from aluminum implanted 4H-SiC by modeling of resistivity measurements (2006) Rambach M, Frey L, Bauer A, Ryssel H Authored book, Volume of book series Untersuchung von Aufladungseffekten bei der Ionenimplantation (2006) Dirnecker T, Ryssel H Authored book Creation of E-Learning Content for Microelectronics Manufacturing (2006) Oechsner R, Pfeffer M, Pfitzner L, Ryssel H, Beer K, Boldin M, de Mey B, et al. Conference contribution