Lehrstuhl für Elektronische Bauelemente

Optimization of illumination pupils and mask features for proximity printing (2009) Motzek K, Bich A, Erdmann A, Hornung M, Hennemeyer M, Meliorisz PB, Hofmann U, et al. Conference contribution Preparation and soft lithographic printing of nano-sized ITO-dispersions for the manufacture of electrodes for TFTs (2009) Straue N, Rauscher M, Walther S, Faber H, Roosen A Journal article, Report Lanthanum implantation for threshold voltage control in metal/high-k devices (2009) Fet A, Haeublein V, Bauer AJ, Ryssel H, Frey L Journal article, Original article Comparative study between conventional macroscopic IV techniques and advanced AFM based methods for electrical characterization of dielectrics at the nanoscale (2009) Yanev V, Erlbacher T, Rommel M, Bauer AJ, Frey L Journal article, Original article Improved manufacturability of ZrO2 MIM capacitors by process stabilizing HfO2 addition (2009) Mueller J, Boescke TS, Schroeder U, Reinicke M, Oberbeck L, Zhou D, Weinreich W, et al. Journal article, Original article Detailed arsenic concentration profiles at Si/SiO2 interfaces (2008) Pei L, Duscher G, Steen C, Pichler P, Ryssel H, Napolitani E, De Salvador D, et al. Journal article, Original article Polymer bonded soft magnetic particles for planar inductive devices (2008) Egelkraut S, März M, Ryssel H Conference contribution Detailed Carrier Lifetime Analysis of Iron-Contaminated Boron-doped Silicon by Comparison of Simulation and Measurement (2008) Rommel M, Bauer A, Ryssel H Journal article Modeling of the Diffusion and Activation of Arsenic in Silicon Including Clustering and Precipitation (2008) Martinez Limia A, Pichler P, Steen C, Paul S, Lerch W Conference contribution Self-aligned growth of organometallic layers for nonvolatile memories: Comparison of liquid-phase and vapor-phase deposition (2008) Erlbacher T, Jank MPM, Ryssel H, Frey L, Engl R, Walter A, Sezi R, Dehm C Journal article