Lehrstuhl für Elektronische Bauelemente

NMOS logic circuits using 4H-SiC MOSFETs for high temperature applications (2010) Le-Huu M, Schrey F, Grieb M, Schmitt H, Haeublein V, Bauer A, Ryssel H, Frey L Authored book, Volume of book series Honeycomb voids due to ion implantation in germanium (2010) Kaiser RJ, Koffel S, Pichler P, Bauer AJ, Amon B, Claverie A, Benassayag G, et al. Journal article, Original article Future challenges in CMOS process modeling (2010) Pichler P, Burenkov A, Lorenz J, Kampen C, Frey L Journal article, Original article Silicon Carbide and Related Materials 2009 - Parts 1 and 2 (2010) Bauer A, Friedrichs P, Krieger M, Pensl G, Rupp R, Seyller T Edited Volume Coupling of Equipment and Feature-Scale Profile Simulation for Dry-Etching of Polysilicon Gate Lines (2010) Baer E, Kunder D, Evanschitzky P, Lorenz J Conference contribution, Conference Contribution Mask diffraction analysis and optimization for EUV masks (2010) Erdmann A, Fühner T, Evanschitzky P Conference contribution, Conference Contribution Aerosol synthesis of silicon nanoparticles with narrow size distribution-Part 1: Experimental investigations (2010) Körmer R, Jank M, Ryssel H, Schmid HJ, Peukert W Journal article, Original article Reduced on resistance in LDMOS devices by integrating trench gates into planar technology (2010) Erlbacher T, Bauer AJ, Frey L Journal article, Original article Influence of FIB patterning strategies on the shape of 3D structures: Comparison of experiments with simulations (2010) Rommel M, Jambreck JD, Ebm C, Platzgummer E, Bauer AJ, Frey L Journal article, Original article Influence of annealing temperature and measurement ambient on TFTs based on gas phase synthesized ZnO nanoparticles (2010) Walther S, Schäfer S, Jank MPM, Thiem H, Peukert W, Frey L, Ryssel H Journal article, Original article