Lehrstuhl für Elektronische Bauelemente

Full wafer microlens replication by UV imprint lithography (2010) Schmitt H, Rommel M, Bauer A, Frey L, Bich A, Eisner M, Voelkel R, Hornung M Journal article Topography-aware BARC optimization for double patterning (2010) Jahn J, Erdmann A, Fühner T, Liu S, Shao F, Barenbaum A Conference contribution, Original article NMOS logic circuits using 4H-SiC MOSFETs for high temperature applications (2010) Le-Huu M, Schrey F, Grieb M, Schmitt H, Haeublein V, Bauer A, Ryssel H, Frey L Authored book, Volume of book series Honeycomb voids due to ion implantation in germanium (2010) Kaiser RJ, Koffel S, Pichler P, Bauer AJ, Amon B, Claverie A, Benassayag G, et al. Journal article, Original article Future challenges in CMOS process modeling (2010) Pichler P, Burenkov A, Lorenz J, Kampen C, Frey L Journal article, Original article Silicon Carbide and Related Materials 2009 - Parts 1 and 2 (2010) Bauer A, Friedrichs P, Krieger M, Pensl G, Rupp R, Seyller T Edited Volume Coupling of Equipment and Feature-Scale Profile Simulation for Dry-Etching of Polysilicon Gate Lines (2010) Baer E, Kunder D, Evanschitzky P, Lorenz J Conference contribution, Conference Contribution Mask diffraction analysis and optimization for EUV masks (2010) Erdmann A, Fühner T, Evanschitzky P Conference contribution, Conference Contribution Aerosol synthesis of silicon nanoparticles with narrow size distribution-Part 1: Experimental investigations (2010) Körmer R, Jank M, Ryssel H, Schmid HJ, Peukert W Journal article, Original article Reduced on resistance in LDMOS devices by integrating trench gates into planar technology (2010) Erlbacher T, Bauer AJ, Frey L Journal article, Original article