Lehrstuhl für Elektronische Bauelemente

Processing of silicon nanostructures by Ga+ resistless lithography and reactive ion etching (2013) Rommel M, Rumler M, Haas A, Bauer AJ, Frey L Journal article, Original article Laser melting of nanoparticulate transparent conductive oxide thin films (2013) Baum M, Polster S, Jank M, Alexeev I, Frey L, Schmidt M Journal article Conceptional design of nano-particulate ITO inks for inkjet printing of electron devices (2013) Kölpin N, Wegener CM, Teuber E, Polster S, Frey L, Roosen A Journal article, Original article Influence of ion implantation in SiC on the channel mobility in lateral n-channel MOSFETs (2013) Strenger C, Uhnevionak V, Burenkov A, Bauer A, Pichler P, Erlbacher T, Ryssel H, Frey L Conference contribution, Conference Contribution Functional epoxy polymer for direct nano-imprinting of micro-optical elements (2013) Fader R, Landwehr J, Rumler M, Rommel M, Bauer A, Frey L, Voelkel R, et al. Journal article, Original article Characterization of diverse gate oxides on 4H-SiC 3D trench-MOS structures (2013) Banzhaf C, Grieb M, Trautmann A, Bauer A, Frey L Authored book, Volume of book series Activation and dissociation of proton-induced donor profiles in silicon (2013) Laven JG, Job R, Hans Joachim S, Niedernostheide FJ, Schustereder W, Frey L Journal article, Original article Evaluation of resistless Ga+ beam lithography for UV NIL stamp fabrication (2013) Rumler M, Fader R, Haas A, Rommel M, Bauer A, Frey L Journal article, Original article Accuracy of wafer level alignment with substrate conformal imprint lithography (2013) Fader R, Rommel M, Bauer A, Rumler M, Frey L, Verschuuren MA, Van De Laar R, et al. Journal article Optimization of copper top-side metallization for high performance SiC-devices (2013) Behrens T, Suenner T, Geinitz E, Schletz A, Frey L Authored book, Volume of book series