Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - FAU CRIS

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

ISSN: 1084-6999
Publisher:

Publications (2)

ENHANCED PIEZOELECTRIC AL(1-X)SC(X)N RF-MEMS RESONATORS FOR SUB-6 GHZ RF-FILTER APPLICATIONS: DESIGN, FABRICATION AND CHARACTERIZATION (2020) Bogner A, Bauder R, Timme HJ, Forster T, Reccius C, Weigel R, Hagelauer A Conference contribution Electrical conductivity and Seebeck coefficient measurements of single nanowires by utilizing a microfabricated thermoelectric nanowire characterization platform (2013) Wang Z, Adhikari SS, Kroener M, Kojda D, Mitdank R, Fischer SF, Toellner W, et al. Conference contribution