Microelectronics Reliability

Journal Abbreviation: MICROELECTRON RELIAB
ISSN: 0026-2714
Publisher: Elsevier

Publications (24)

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Abstract

Electrical properties of hafnium silicate films obtained from a single-source MOCVD precursor (2005) Lemberger M, Paskaleva A, Zürcher S, Bauer A, Frey L, Ryssel H Journal article, Original article Electrical Characterization of Zirconium Silicate Films Obtained from Novel MOCVD Precursors (2003) Paskaleva A, Lemberger M, Zürcher S, Bauer A, Frey L, Ryssel H Conference contribution Electrical reliability aspects of through the gate implanted MOS structures with thin oxides (2001) Jank M, Lemberger M, Bauer A, Frey L, Ryssel H Journal article, Original article A comparison of focused ion beam and electron beam induced deposition processes (1996) Lipp S, Frey L, Lehrer C, Demm E, Pauthner S, Ryssel H Journal article, Original article
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