Microelectronic Engineering

Journal Abbreviation: MICROELECTRON ENG
ISSN: 0167-9317
Publisher: Elsevier

Publications (37)

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Abstract

Functional epoxy polymer for direct nano-imprinting of micro-optical elements (2013) Fader R, Landwehr J, Rumler M, Rommel M, Bauer A, Frey L, Voelkel R, et al. Journal article, Original article Life time evaluation of PDMS stamps for UV-enhanced substrate conformal imprint lithography (2012) Schmitt H, Duempelmann P, Fader R, Rommel M, Bauer AJ, Frey L, Brehm M, Kraft A Journal article, Original article Novel organic polymer for UV-enhanced substrate conformal imprint lithography (2012) Fader R, Schmitt H, Rommel M, Bauer AJ, Frey L, Ji R, Hornung M, et al. Journal article, Original article Simple and efficient method to fabricate nano cone arrays by FIB milling demonstrated on planar substrates and on protruded structures (2012) Rommel M, Bauer AJ, Frey L Journal article, Original article Germanium substrate loss during thermal processing (2011) Kaiser RJ, Koffel S, Pichler P, Bauer AJ, Amon B, Frey L, Ryssel H Journal article, Original article Experiments and simulation of the diffusion and activation of the n-type dopants P, As, and Sb implanted into germanium (2011) Koffel S, Kaiser RJ, Bauer AJ, Amon B, Pichler P, Lorenz J, Frey L, et al. Journal article, Original article Manufacturing, characterization, and application of nanoimprinted metallic probe demonstrators for electrical scanning probe microscopy (2011) Jambreck JD, Yanev V, Schmitt H, Rommel M, Bauer AJ, Frey L Journal article, Original article Full wafer microlens replication by UV imprint lithography (2010) Schmitt H, Rommel M, Bauer A, Frey L, Bich A, Eisner M, Voelkel R, Hornung M Journal article Influence of FIB patterning strategies on the shape of 3D structures: Comparison of experiments with simulations (2010) Rommel M, Jambreck JD, Ebm C, Platzgummer E, Bauer AJ, Frey L Journal article, Original article Influence of annealing temperature and measurement ambient on TFTs based on gas phase synthesized ZnO nanoparticles (2010) Walther S, Schäfer S, Jank MPM, Thiem H, Peukert W, Frey L, Ryssel H Journal article, Original article
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