Piezo-Resistive Sensing Active (PRSA) Probes integrated into a Nanomeasuring Machine (NMM-1)

El Melegy A, Weinert B, Hausotte T, El-Wahed Younes MA, Mohammed Ahmed A (2016)

Publication Language: English

Publication Type: Conference contribution, Conference Contribution

Publication year: 2016

Conference Proceedings Title: Proceedings of the NanoMetrology France 2016

Event location: Paris FR

Authors with CRIS profile

Ahmed El Melegy Lehrstuhl für Fertigungsmesstechnik Benedict Weinert Lehrstuhl für Fertigungsmesstechnik Tino Hausotte Lehrstuhl für Fertigungsmesstechnik

How to cite

APA:

El Melegy, A., Weinert, B., Hausotte, T., El-Wahed Younes, M.A., & Mohammed Ahmed, A. (2016). Piezo-Resistive Sensing Active (PRSA) Probes integrated into a Nanomeasuring Machine (NMM-1). In SECTOR (Eds.), Proceedings of the NanoMetrology France 2016. Paris, FR.

MLA:

El Melegy, Ahmed, et al. "Piezo-Resistive Sensing Active (PRSA) Probes integrated into a Nanomeasuring Machine (NMM-1)." Proceedings of the NanoMetrology 2016, Paris Ed. SECTOR, 2016.

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