Nanopositioning and Nanomeasuring Machine NPMM-200 - sub-nanometre resolution and highest accuracy in extended macroscopic working areas
Manske E, Jäger G, Hausotte T, Müller A, Balzer F (2017)
Publication Type: Conference contribution
Publication year: 2017
Pages Range: 1-2
Event location: Hannover
URI: http://www.euspen.eu
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How to cite
APA:
Manske, E., Jäger, G., Hausotte, T., Müller, A., & Balzer, F. (2017). Nanopositioning and Nanomeasuring Machine NPMM-200 - sub-nanometre resolution and highest accuracy in extended macroscopic working areas. In Proceedings of the euspen’s 17th International Conference & Exhibition (pp. 1-2). Hannover, DE.
MLA:
Manske, Eberhard, et al. "Nanopositioning and Nanomeasuring Machine NPMM-200 - sub-nanometre resolution and highest accuracy in extended macroscopic working areas." Proceedings of the euspen’s 17th International Conference & Exhibition, Hannover 2017. 1-2.
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