Progress on the wide scale nano-positioning-and nanomeasuring machine by integration of optical-nanoprobes
Jäger G, Hausotte T, Manske E, Büchner HJ, Mastylo R, Vorbringer-Dorozhovets N, Füßl R, Grünwald R (2006)
Publication Status: Published
Publication Type: Conference contribution, Conference Contribution
Publication year: 2006
Pages Range: 291-298
Abstract
The integration of several, optical and tactile probe systems and scanning force microscopes makes the NPM-Machine suitable for various tasks, such as large-area scanning probe microscopy, mask and water inspection, circuit testing as well as measuring optical and mechanical precision work pieces such as micro lens arrays, concave lenses, mm-step height standards.
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Germany (DE)How to cite
APA:
Jäger, G., Hausotte, T., Manske, E., Büchner, H.-J., Mastylo, R., Vorbringer-Dorozhovets, N.,... Grünwald, R. (2006). Progress on the wide scale nano-positioning-and nanomeasuring machine by integration of optical-nanoprobes. (pp. 291-298).
MLA:
Jäger, Gerd, et al. "Progress on the wide scale nano-positioning-and nanomeasuring machine by integration of optical-nanoprobes." 2006. 291-298.
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