Defect structures at the silicon/3C-SiC interface

Hens P, Müller J, Spiecker E, Wellmann P (2012)


Publication Language: English

Publication Status: Published

Publication Type: Journal article, Original article

Publication year: 2012

Journal

Book Volume: 717-720

Pages Range: 423-426

Event location: Cleveland, OH US

ISBN: 9783037854198

DOI: 10.4028/www.scientific.net/MSF.717-720.423

Abstract

In all heteroepitaxial systems the interface between substrate and layer is a crucial point. In this work SEM and TEM studies on the interface between silicon substrate and cubic silicon carbide (3C-SiC) layers obtained by chemical vapor deposition (CVD) are presented. A clear connection between process parameters, like the design of substrate cleaning, and the heating ramp, and resulting defect structures at the substrate-layer interface could be found. Whereas the process step of etching in hot hydrogen for oxide removal is crucial for avoiding the generation of closed voids of type 2, the design of the temperature ramp-up to growth temperature during carbonization influences the interface roughness. Here a fast ramp helps to obtain a flat interface. © (2012) Trans Tech Publications.

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How to cite

APA:

Hens, P., Müller, J., Spiecker, E., & Wellmann, P. (2012). Defect structures at the silicon/3C-SiC interface. Materials Science Forum, 717-720, 423-426. https://doi.org/10.4028/www.scientific.net/MSF.717-720.423

MLA:

Hens, Philip, et al. "Defect structures at the silicon/3C-SiC interface." Materials Science Forum 717-720 (2012): 423-426.

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