Nanopositioning and - measuring technique
Jäger G, Manske E, Hausotte T, Büchner HJ, Grünwald R (2002)
Publication Status: Published
Publication Type: Conference contribution
Publication year: 2002
Journal
Publisher: International Society for Optical Engineering; 1999
Book Volume: 4900
Pages Range: 240-246
Conference Proceedings Title: Proceedings Volume 4900, 7th International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life
Event location: Novosibirsk
DOI: 10.1117/12.484563
Abstract
At the Institute of Process Measurement and Sensor Technology of the TU Ilmenau, a scanning force microscope (measuring range 15 mum x 75 mum x 15 mum) having a laser-interferometric 3D-nanomeasuring system free from Abbe errors has been developed in cooperation with the PTB Braunschweig. The extended measuring uncertainty (K = 2) is only 0.2 nm and was obtained with a structure standard. To achieve a considerable extension of the measuring range up to 25 mm x 25 mm x 5 mm, a nanopositioning and -measuring machine was developed. The resolution of the measuring axes is 1.24 nm. The laser-interferometric measurement is free from Abbe errors of 1(st) order in all measuring axes. The deviations of the guides used are compensated by means of a precision mirror corner.
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Germany (DE)How to cite
APA:
Jäger, G., Manske, E., Hausotte, T., Büchner, H.-J., & Grünwald, R. (2002). Nanopositioning and - measuring technique. In Proceedings Volume 4900, 7th International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life (pp. 240-246). Novosibirsk, RU: International Society for Optical Engineering; 1999.
MLA:
Jäger, Gerd, et al. "Nanopositioning and - measuring technique." Proceedings of the 7th International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, Novosibirsk International Society for Optical Engineering; 1999, 2002. 240-246.
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