Integration of probe systems in a nanopositioning and nanomeasuring machine
Jäger G, Manske E, Hausotte T, Mastylo R, Büchner HJ, Grünwald R, Füßl R (2005)
Publication Status: Published
Publication Type: Conference contribution
Publication year: 2005
Journal
Publisher: International Society for Optical Engineering; 1999
Book Volume: 5776
Pages Range: 168-172
Conference Proceedings Title: Proceedings Volume 5776, 8th International Symposium on Laser Metrology
Event location: Merida
DOI: 10.1117/12.611848
Abstract
The paper describes the design of a high-precision three-deminsional nanopositioning and nanomeasuring machine (NPM-Machine). The NPM-Machine has been developed by the Institute of Process Measurement and Sensor Technology of the Technische Universitat Ilmenau and manufactured by the SIOS MeBtechnik GmbH Ilmenau. The machine was successfully tested and continually improved in the last few years. The NPM-Machine has a resolution of less than 0,1 nm over the entire positioning and measuring range of 25 mm x 25 mm x 5 mm. An Abbe offset-free design and the application of a new concept for compensating systematic errors resulting from mechanical bearings provide extraordinary accuracy. An important part of the NPM-Machine is constituted by a mirror corner. The integration of several probe systems and Nanotools makes the NPM-Machine suitable for various tasks, such as large-area scanning probe microscopy, mask and wafer inspection, nanostructuring, biotechnology as well as measuring mechanical precision workpieces a.s.o. Various probe systems have been integrated into the NPM-Machines. The machines are operating successfully in several German and foreign institutes including the Physikalisch-Technische Bundesanstalt (PTB). The article gives basic information on the NPM-Machine and describes the mode of operation and the measurements by means of probe systems.
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Germany (DE)How to cite
APA:
Jäger, G., Manske, E., Hausotte, T., Mastylo, R., Büchner, H.-J., Grünwald, R., & Füßl, R. (2005). Integration of probe systems in a nanopositioning and nanomeasuring machine. In Proceedings Volume 5776, 8th International Symposium on Laser Metrology (pp. 168-172). Merida, MX: International Society for Optical Engineering; 1999.
MLA:
Jäger, Gerd, et al. "Integration of probe systems in a nanopositioning and nanomeasuring machine." Proceedings of the 8th International Conference on Laser Metrology, Merida International Society for Optical Engineering; 1999, 2005. 168-172.
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