Nanopositioning and nanomeasuring machine NPMM-200 - a new powerful tool for large-range micro- and nanotechnology

Jäger G, Manske E, Hausotte T, Müller A, Balzer F (2016)

Publication Language: English

Publication Type: Journal article, Review article

Publication year: 2016

Journal

Surface Topography: Metrology and Properties IOP Publishing

Publisher: IOP Publishing

Article Number: 034004

Journal Issue: 4

DOI: 10.1088/2051-672X/4/3/034004

Authors with CRIS profile

Tino Hausotte Lehrstuhl für Fertigungsmesstechnik

Involved external institutions

Technische Universität Ilmenau DE Germany (DE)

How to cite

APA:

Jäger, G., Manske, E., Hausotte, T., Müller, A., & Balzer, F. (2016). Nanopositioning and nanomeasuring machine NPMM-200 - a new powerful tool for large-range micro- and nanotechnology. Surface Topography: Metrology and Properties, 4. https://dx.doi.org/10.1088/2051-672X/4/3/034004

MLA:

Jäger, Gerd, et al. "Nanopositioning and nanomeasuring machine NPMM-200 - a new powerful tool for large-range micro- and nanotechnology." Surface Topography: Metrology and Properties 4 (2016).

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