Reindl L, Ruppel C, Riek K, Pankratz T, Weigel R (1998)
Publication Type: Conference contribution
Publication year: 1998
Book Volume: 1
Pages Range: 355-358
Conference Proceedings Title: Proceedings of IEEE Ultrasonics Symposium
Event location: Sendai, Japan
We report of the design of a SAW delay line developed for a wireless pressure sensing system operating in the 434 MHz ISM-band. The structure is a one port configuration fabricated on quartz 37.5°rotYX. It is hermetically sealed in all-quartz-package (APQ) technology with the SAW structure being placed on a diaphragm inside the cavity. The sensor allows for the measurement of absolute pressure values in the range from 0 to 8.5 bar. The SAW structure shows a linear phase although it incorporates chirped SAW components for enhancing the sensor sensitivity. The SAW structure is built up of two overlap-weighted dispersive split finger interdigital transducers (IDTs). An improvement of the sensor sensitivity by a factor of 32 compared to systems using non-dispersive SAW components has been achieved
APA:
Reindl, L., Ruppel, C., Riek, K., Pankratz, T., & Weigel, R. (1998). A wireless AQP pressure sensor using chirped SAW delay lines structures. In Proceedings of IEEE Ultrasonics Symposium (pp. 355-358). Sendai, Japan.
MLA:
Reindl, Leonhard, et al. "A wireless AQP pressure sensor using chirped SAW delay lines structures." Proceedings of the Proceedings of IEEE Ultrasonics Symposium, Sendai, Japan 1998. 355-358.
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