System Concept of a Robust and Reproducible Plasma-Based Coating Process for the Manufacturing of Power Electronic Applications

Hensel A, Müller M, Franke J, Kohlmann-von Platen K (2017)

Publication Language: German

Publication Type: Conference contribution, Conference Contribution

Publication year: 2017

Publisher: Apprimus Verlag, Aachen, 2017 Wissenschaftsverlag des Instituts für Industriekommunikation und Fachmedien an der RWTH Aachen Steinbachstr. 25, 52074 Aachen Internet: www.apprimus-verlag.de, E-Mail: info@apprimus-verlag.de

City/Town: Aachen

Pages Range: 79-85

Conference Proceedings Title: 7. WGP-Jahreskongress Aachen, 5.-6. Oktober 2017

Event location: RWTH Aachen

ISBN: 978-3-86359-555-5

Abstract

The increasing integration of power electronics in various applications like energy
distribution, hybrid and electric mobility or consumer products requires a steady improvement of
interconnection technologies in order to increase reliability, efficiency and life expectancy of power
modules.
Currently the standard technology used for top level interconnection is the aluminum wire bonding
process. Thereby wires are friction welded both on dies and substrates by the use of ultrasonic in
order to create a local cohesively connection. Due to the limitation of aluminum regarding the
mechanical, thermal, and electric characteristics, the use of alternative materials like copper is
preferred. However, due to the higher hardness of copper, copper wire bonding on the previous
aluminum metallization of the components is not possible, so that an additional copper metallization
is necessary to be applied. Common processes for the metallization of semiconductors like PVD or
galvanic metallization are either expensive or require extensive follow up processes like back etching.
In order to provide another suitable method a plasma based coating unit for copper particles has been
installed.

Authors with CRIS profile

Alexander Hensel Lehrstuhl für Fertigungsautomatisierung und Produktionssystematik Martin Muckelbauer Lehrstuhl für Fertigungsautomatisierung und Produktionssystematik Jörg Franke Lehrstuhl für Fertigungsautomatisierung und Produktionssystematik

How to cite

APA:

Hensel, A., Müller, M., Franke, J., & Kohlmann-von Platen, K. (2017). System Concept of a Robust and Reproducible Plasma-Based Coating Process for the Manufacturing of Power Electronic Applications. In Robert Schmitt; Günther Schuh (Hrsg.): (Hrg.), 7. WGP-Jahreskongress Aachen, 5.-6. Oktober 2017 (S. 79-85). RWTH Aachen: Aachen: Apprimus Verlag, Aachen, 2017 Wissenschaftsverlag des Instituts für Industriekommunikation und Fachmedien an der RWTH Aachen Steinbachstr. 25, 52074 Aachen Internet: www.apprimus-verlag.de, E-Mail: info@apprimus-verlag.de.

MLA:

Hensel, Alexander, et al. "System Concept of a Robust and Reproducible Plasma-Based Coating Process for the Manufacturing of Power Electronic Applications." Tagungsband 7. WGP Jahreskongress, RWTH Aachen Hrg. Robert Schmitt; Günther Schuh (Hrsg.):, Aachen: Apprimus Verlag, Aachen, 2017 Wissenschaftsverlag des Instituts für Industriekommunikation und Fachmedien an der RWTH Aachen Steinbachstr. 25, 52074 Aachen Internet: www.apprimus-verlag.de, E-Mail: info@apprimus-verlag.de, 2017. 79-85.

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