Highly resolved analysis of the chemistry and mechanical properties of an a-C:H coating system by nanoindentation and auger electron spectroscopy

Schmid C, Maier V, Schaufler J, Butz B, Spiecker E, Meier S, Göken M, Durst K (2013)

Publication Status: Published

Publication Type: Journal article

Publication year: 2013

Journal

Thin Solid Films Elsevier

Publisher: Elsevier

Book Volume: 528

Pages Range: 263-268

DOI: 10.1016/j.tsf.2012.05.092

Abstract

The small-angle cross-section method was applied to a multi-layered hydrogenated amorphous carbon coating (a-C:H) system deposited by plasma enhanced chemical vapour deposition. The investigated system consists of a silicon rich adhesion layer and an adjacent ramp layer with a graded chemical composition to the a-C:H coating. The mechanical properties and the corresponding chemical gradients of the coating system were analysed by a combination of the small-angle cross-section method together with auger electron spectroscopy and nanoindentation. Furthermore, energy filtered transmission electron microscopy on a thin lamella was used to check the reliability of the auger electron spectroscopy results. It was found that local gradients in the chemical composition within the coating relate well to gradients observed in the local mechanical properties. The used combination of the different methods enables to resolve the correlation between the microstructure, chemical composition and mechanical properties of thin film systems with high spatial resolution. (c) 2012 Elsevier B.V. All rights reserved.

Authors with CRIS profile

Christoph Schmid Lehrstuhl für Werkstoffwissenschaften (Allgemeine Werkstoffeigenschaften) Verena Maier Lehrstuhl für Werkstoffwissenschaften (Allgemeine Werkstoffeigenschaften) Jens Schaufler Lehrstuhl für Werkstoffwissenschaften (Allgemeine Werkstoffeigenschaften) Benjamin Butz Lehrstuhl für Werkstoffwissenschaften (Mikro- und Nanostrukturforschung) Erdmann Spiecker Lehrstuhl für Werkstoffwissenschaften (Mikro- und Nanostrukturforschung) Mathias Göken Lehrstuhl für Werkstoffwissenschaften (Allgemeine Werkstoffeigenschaften) Karsten Durst Lehrstuhl für Werkstoffwissenschaften (Allgemeine Werkstoffeigenschaften)

Additional Organisation(s)

Exzellenz-Cluster Engineering of Advanced Materials Interdisziplinäres Zentrum, Center for Nanoanalysis and Electron Microscopy (CENEM) Lehrstuhl für Werkstoffwissenschaften (Allgemeine Werkstoffeigenschaften)

Related research project(s)

In-situ nanomechanics and FIB tomography of thin films (EXC315 EAM (A2-3)) Exzellenz-Cluster Engineering of Advanced Materials Nov. 1, 2012 - Oct. 31, 2017

Involved external institutions

Fraunhofer-Institut für Werkstoffmechanik (IWM) / Fraunhofer Institute for Mechanics of Materials DE Germany (DE)

How to cite

APA:

Schmid, C., Maier, V., Schaufler, J., Butz, B., Spiecker, E., Meier, S.,... Durst, K. (2013). Highly resolved analysis of the chemistry and mechanical properties of an a-C:H coating system by nanoindentation and auger electron spectroscopy. Thin Solid Films, 528, 263-268. https://dx.doi.org/10.1016/j.tsf.2012.05.092

MLA:

Schmid, Christoph, et al. "Highly resolved analysis of the chemistry and mechanical properties of an a-C:H coating system by nanoindentation and auger electron spectroscopy." Thin Solid Films 528 (2013): 263-268.

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