Test Method for Contactless On-wafer MEMS Characterization and Production Monitoring

Linz S, Oesterle F, Lindner S, Mann S, Weigel R, Kölpin A (2016)


Publication Language: English

Publication Type: Journal article

Publication year: 2016

Journal

Publisher: IEEE

Book Volume: 64

Pages Range: 3918-3926

Journal Issue: 11

DOI: 10.1109/TMTT.2016.2612664

Authors with CRIS profile

How to cite

APA:

Linz, S., Oesterle, F., Lindner, S., Mann, S., Weigel, R., & Kölpin, A. (2016). Test Method for Contactless On-wafer MEMS Characterization and Production Monitoring. IEEE Transactions on Microwave Theory and Techniques, 64(11), 3918-3926. https://dx.doi.org/10.1109/TMTT.2016.2612664

MLA:

Linz, Sarah, et al. "Test Method for Contactless On-wafer MEMS Characterization and Production Monitoring." IEEE Transactions on Microwave Theory and Techniques 64.11 (2016): 3918-3926.

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