Journal article
(Original article)


Evaluation and Calibration of LCoS SLM for Direct Laser Structuring with Tailored Intensity Distributions


Publication Details
Author(s): Strauß J, Häfner T, Dobler M, Heberle J, Schmidt M
Publisher: Elsevier BV
Publication year: 2016
Volume: 83
Pages range: 1160-1169
ISSN: 1875-3892
eISSN: 1875-3884
Language: English

Abstract

Tailored intensity distribution enables efficient microstructuring as the maximum pulse energy of an ultrashort-pulsed laser can be applied. Dynamic adaptation of the intensity profile can be realized by holographic laser beam shaping using phase-only liquid crystal on silicon (LCoS) displays as a spatial light modulator (SLM). To achieve the desired intensity profile at the focal plane an accurate phase retardation of the SLM's liquid crystals has to be guaranteed. In this publication we present the phase calibration of three LCoS SLM from different manufacturers. Each system is evaluated for direct laser structuring applications. As one of the tested SLM show a spatially nonlinear behavior, a compensation method proposed by Engström et al. in 2013 is applied. Finally, the necessity of this phase calibration is presented and discussed by applying a squared flat-top profile.



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How to cite
APA: Strauß, J., Häfner, T., Dobler, M., Heberle, J., & Schmidt, M. (2016). Evaluation and Calibration of LCoS SLM for Direct Laser Structuring with Tailored Intensity Distributions. Physics Procedia, 83, 1160-1169. https://dx.doi.org/10.1016/j.phpro.2016.08.122

MLA: Strauß, Johannes, et al. "Evaluation and Calibration of LCoS SLM for Direct Laser Structuring with Tailored Intensity Distributions." Physics Procedia 83 (2016): 1160-1169.

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