Conference contribution
(Conference Contribution)


Development of a 3D capable probing system based on electrical near-field interactions for micro- and nano-coordinate metrology


Publication Details
Author(s): Sun Z, Hausotte T
Publication year: 2016
Pages range: 159-161
ISBN: 978-3-9816876-0-6

Event details
Event: 18. GMA/ITG-Fachtagung Sensoren und Messsysteme 2016
Event location: Nürnberg
Start date of the event: 10/05/2016
End date of the event: 11/05/2016
Language: English



How to cite
APA: Sun, Z., & Hausotte, T. (2016). Development of a 3D capable probing system based on electrical near-field interactions for micro- and nano-coordinate metrology. (pp. 159-161). Nürnberg, DE.

MLA: Sun, Zhongyuan, and Tino Hausotte. "Development of a 3D capable probing system based on electrical near-field interactions for micro- and nano-coordinate metrology." Proceedings of the 18. GMA/ITG-Fachtagung Sensoren und Messsysteme 2016, Nürnberg 2016. 159-161.

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