Journal article


Physical mechanisms of SiNx layer structuring with ultrafast lasers by direct and confined laser ablation


Publication Details
Author(s): Rapp S, Heinrich G, Wollgarten M, Huber HP, Schmidt M
Publisher: American Institute of Physics (AIP)
Publication year: 2015
Volume: 117
Journal issue: 10
Pages range: 105304
ISSN: 0021-8979



Focus Area of Individual Faculties


How to cite
APA: Rapp, S., Heinrich, G., Wollgarten, M., Huber, H.P., & Schmidt, M. (2015). Physical mechanisms of SiNx layer structuring with ultrafast lasers by direct and confined laser ablation. Journal of Applied Physics, 117(10), 105304. https://dx.doi.org/10.1063/1.4914457

MLA: Rapp, S., et al. "Physical mechanisms of SiNx layer structuring with ultrafast lasers by direct and confined laser ablation." Journal of Applied Physics 117.10 (2015): 105304.

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