Update on a 3D probing system based on electrical near-field interaction for micro- and nano-coordinate metrology

Sun Z, Schuler A, Hausotte T (2015)


Publication Language: English

Publication Type: Conference contribution, Abstract of lecture

Publication year: 2015

Event location: Teddington GB

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How to cite

APA:

Sun, Z., Schuler, A., & Hausotte, T. (2015). Update on a 3D probing system based on electrical near-field interaction for micro- and nano-coordinate metrology. Paper presentation at Micro/Nano Manufacturing Workshop, Teddington, GB.

MLA:

Sun, Zhongyuan, Alexander Schuler, and Tino Hausotte. "Update on a 3D probing system based on electrical near-field interaction for micro- and nano-coordinate metrology." Presented at Micro/Nano Manufacturing Workshop, Teddington 2015.

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