Focus Alignment Method for Laser Manufacturing at Sub-micron Positional Accuracy

Strauß J, Cvecek K, Gröschl AC, Alexeev I, Schmidt M (2012)


Publication Language: English

Publication Type: Journal article

Publication year: 2012

Journal

Publisher: Elsevier BV

Book Volume: 39

Pages Range: 800-806

DOI: 10.1016/j.phpro.2012.10.103

Open Access Link: http://www.sciencedirect.com/science/article/pii/S1875389212026302

Abstract

Accurate positioning of a sample is one of the major challenges in the laser micro manufacturing – especially if the requirements on tolerances are high as in ultrafast laser micromachining. There are a number of methods that allow detection of the surface position, however only few of them use the beam of the processing laser as a basis for the measurement. These methods have an advantage that any changes in the structuring beam will be inherently accommodated for. This work describes a direct contact free method to accurately determine the surface position with respect to the structuring beam focal plane. The method makes alignment of unique samples precise and time efficient due to ease of automation and provides a reproducibility of surface detection of less than 1 μm.

 

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APA:

Strauß, J., Cvecek, K., Gröschl, A.C., Alexeev, I., & Schmidt, M. (2012). Focus Alignment Method for Laser Manufacturing at Sub-micron Positional Accuracy. Physics Procedia, 39, 800-806. https://dx.doi.org/10.1016/j.phpro.2012.10.103

MLA:

Strauß, Johannes, et al. "Focus Alignment Method for Laser Manufacturing at Sub-micron Positional Accuracy." Physics Procedia 39 (2012): 800-806.

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