Traceable three-dimensional nanometrology (3DNano)

Third Party Funds Group - Sub project


Acronym: 3DNano

Start date : 01.10.2016

End date : 30.09.2019

Website: https://www.ptb.de/emrp/15sib09-home.html

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Overall project details

Overall project

Traceable three-dimensional nanometrology

Project details

Short description

The overall goal of this project is to meet current and future requirements for traceable 3 dimensional (3D) metrology at the nanometre level with measurement uncertainties below 1 nm. To achieve this requires new routes for traceability, further developments of existing instruments and validated 3D measurement procedures. Additionally, new calibration artefacts must be developed and made available to industry as traceable reference standards to enable valid comparison of fabrication and measurement results, and establish a robust basis for design of objects with traceable nanoscale dimensions and tolerances.
Scanning Probe Microscopes (SPMs) available in national metrology institutes (NMIs) have low uncertainties, are traceable to the SI-metre and significantly outperform commercial SPMs in accuracy. However, there is a large gap between SPMs and the rest of 3D metrology. Conventional 3D metrology is based on coordinate measuring machines (CMMs) that have been significantly improved in recent decades e.g. micro CMMs, therefore they can reach almost nanometre level uncertainties. SPM technology has the potential to offer even lower uncertainties. However, the measuring principle, measurand definitions and current written standards are still very far from what could be used for 3D measurements, which explains the use of the term 2.5D for SPM techniques. The aim of the project is to further develop SPM instrumentation, measurement procedures, data interpretation and reference materials to bridge this gap, as proper understanding of probe-sample interactions is crucial for the reduction of measurement uncertainty.

Involved:

Tino Hausotte Project Leader Ute Klöpzig Project Member Janik Schaude Project Member Yiting Wu Project Member Benedict Weinert Project Member

Contributing FAU Organisations:

Lehrstuhl für Fertigungsmesstechnik Sonderforschungsbereich/Transregio 73 Umformtechnische Herstellung von komplexen Funktionsbauteilen mit Nebenformelementen aus Feinblechen - Blechmassivumformung

Funding Source

The European Metrology Programme for Research and Innovation (EMPIR)