State-of-the-Art Materials Used in MEMS Micromirror Arrays for Photonic Applications

Liu S, Kästner P, Donatiello R, Shrivastava A, Smolarczyk M, Iskhandar MSQ, Hasan MK, Caruso G, Chen J, Elsaka B, Baby S, Löber D, Kusserow T, Adam J, Hillmer H (2024)

Publication Type: Journal article, Review article

Publication year: 2024

Journal

Photonics MDPI

Book Volume: 11

Article Number: 253

Journal Issue: 3

DOI: 10.3390/photonics11030253

Abstract

This work provides an overview on micromirror arrays based on different material systems such as dielectrics, element silicon, compound semiconductors, metals, and novel 2D materials. The goal is to work out the particular strength of each material system to enable optimum performance for various applications. In particular, this review is intended to draw attention to the fact that MEMS micro-mirrors can be successful in many other material systems besides silicon. In particular, the review is intended to draw attention to two material systems that have so far been used less for MEMS micromirror arrays, that have been less researched, and of which fewer applications have been reported to date: metallic heterostructures and 2D materials. However, the main focus is on metallic MEMS micromirror arrays on glass substrates for applications like personalized light steering in buildings via active windows, energy management, active laser safety goggles, interference microscopy, and endoscopy. Finally, the different micromirror arrays are compared with respect to fabrication challenges, switching speed, number of mirrors, mirror dimensions, array sizes, miniaturization potential for individual mirrors, reliability, lifetime, and hinge methodology.

Authors with CRIS profile

Thomas Kusserow Lehrstuhl für Optoelektronik

Involved external institutions

CARUSO & FREELAND GmbH CH Switzerland (CH) Universität Kassel DE Germany (DE)

How to cite

APA:

Liu, S., Kästner, P., Donatiello, R., Shrivastava, A., Smolarczyk, M., Iskhandar, M.S.Q.,... Hillmer, H. (2024). State-of-the-Art Materials Used in MEMS Micromirror Arrays for Photonic Applications. Photonics, 11(3). https://doi.org/10.3390/photonics11030253

MLA:

Liu, Shujie, et al. "State-of-the-Art Materials Used in MEMS Micromirror Arrays for Photonic Applications." Photonics 11.3 (2024).

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