Effect of Growth Conditions on the Surface Morphology and Defect Density of CS-PVT-Grown 3C-SiC

Kollmuß M, La Via F, Wellmann P (2023)

Publication Type: Journal article

Publication year: 2023

Journal

Crystal Research and Technology Wiley-VCH Verlag

DOI: 10.1002/crat.202300034

Abstract

A systematic approach to determine the most crucial growth parameters and their effect on the surface morphology and defect density of sublimation grown (001) cubic silicon carbide (3C-SiC) is conducted. Close space physical vapor transport (CS-PVT) growth on 3C-SiC and 4° off oriented homoepitaxial chemical vapor deposition (CVD) grown seeding layers is performed. For each growth run, one growth parameter, e.g., temperature, pressure, or N2 flux is varied, while the other parameters are kept constant. Raman spectroscopy, potassium hydroxide (KOH) etching, as well as optical microscopy and atomic force microscopy (AFM) are used for the sample characterization. Step-flow-controlled growth is observed on all grown samples, while the stacking fault density is generally reduced with respect to the seeding layers. Increased temperature as well as increased pressure leads to roughening of the growth surface attributed to step bunching, while their effect on the stacking fault density seems to be only minor in the analyzed parameter range. Areas of strongly enhanced step bunching are present on all samples, and this effect is more pronounced at higher temperature and pressure. Increased nitrogen doping leads to a decreased stacking fault density but also increases the length of remaining stacking faults. The surface morphology is influenced by N2 on a macroscopic level rather than on microscopic scale.

Authors with CRIS profile

Manuel Kollmuß Professur für Werkstoffwissenschaften (Werkstoffe der Elektrotechnik) Peter Wellmann Professur für Werkstoffwissenschaften (Werkstoffe der Elektrotechnik)

Involved external institutions

CNR Institute for Microelectronics and Microsystems (CNR-IMM) IT Italy (IT)

How to cite

APA:

Kollmuß, M., La Via, F., & Wellmann, P. (2023). Effect of Growth Conditions on the Surface Morphology and Defect Density of CS-PVT-Grown 3C-SiC. Crystal Research and Technology. https://dx.doi.org/10.1002/crat.202300034

MLA:

Kollmuß, Manuel, Francesco La Via, and Peter Wellmann. "Effect of Growth Conditions on the Surface Morphology and Defect Density of CS-PVT-Grown 3C-SiC." Crystal Research and Technology (2023).

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