Combination of a micro-lens multi-spot generator with a galvanometer scanner for flexible parallel micromachining of silicon
Zimmermann M, Schmidt M (2011)
Publication Type: Conference contribution
Publication year: 2011
Journal
Book Volume: 8130
Conference Proceedings Title: Proceedings of SPIE - The International Society for Optical Engineering
Event location: USA
ISBN: 9780819487407
DOI: 10.1117/12.892679
Abstract
Multi focus optics are used for parallelizing production and for large-scale material processing. These elements split the beam into a periodic spot pattern with a defined grid and spot size. The challenge lies in the generation of a homogeneous envelope. Additionally the demand for flexible systems for an in-process changing of optical properties increases. Different components for multi spot generation like diffractive optical elements or micro lens arrays have been investigated. Diffractive optical elements offer large degree of freedom in the generation of arbitrary intensity distributions. In the paper we demonstrate the use of a diffractive element in combination with a multi spot generator. Within the paper we present the investigation of a micro lens array in a fly's eye condenser setup for the generation of homogeneous spot patterns. The multi spot generator is combined with a galvanometer scanner for forming an arbitrary shaped laser beam into a spot-, ring or arbitrary array pattern. We show the principal functionality of the multi-spot generator. Furthermore constrains of this setup are demonstrated. The multi spot scanner is used for micro structuring of silicon with a nanosecond diode pumped solid state laser. The ablation rate and structure quality are compared to single spot processing. © 2011 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).
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Germany (DE)How to cite
APA:
Zimmermann, M., & Schmidt, M. (2011). Combination of a micro-lens multi-spot generator with a galvanometer scanner for flexible parallel micromachining of silicon. In Proceedings of SPIE - The International Society for Optical Engineering. USA.
MLA:
Zimmermann, Maik, and Michael Schmidt. "Combination of a micro-lens multi-spot generator with a galvanometer scanner for flexible parallel micromachining of silicon." Proceedings of the Laser Beam Shaping XII, USA 2011.
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