März M, Oestreicher W (1994)
Publication Type: Journal article
Publication year: 1994
Book Volume: 65
Pages Range: 2980-2983
Journal Issue: 9
DOI: 10.1063/1.1144588
A single ridged waveguide with nonconstant ridge height, operated with a traveling wave has been proven to be a versatile microwave plasma applicator. Easy dimensioning, inexpensive production, and compatibility to standard rectangular waveguide components are the main advantages compared to other designs. The described plasma source is especially suitable for any applications where an exceptionally uniform plasma is required. Design equations are given for easy adaption of the applicator to individual requirements. The applicator has been investigated for microwave excitation of a diffusion-cooled CO 2 laser. With a nonoptimized system, laser output power of 9 W could be achieved in a quasi-cw mode. A traveling discharge operating mode is described which is useful for plasma diagnostics and for pulsed laser applications.
APA:
März, M., & Oestreicher, W. (1994). A versatile microwave plasma source and its application for a CO 2 laser. Review of Scientific Instruments, 65(9), 2980-2983. https://dx.doi.org/10.1063/1.1144588
MLA:
März, Martin, and Wolfgang Oestreicher. "A versatile microwave plasma source and its application for a CO 2 laser." Review of Scientific Instruments 65.9 (1994): 2980-2983.
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