Exploring the depth range for three-dimensional laser machining with aberration correction
Salter PS, Baum M, Alexeev I, Schmidt M, Booth MJ (2014)
Publication Type: Journal article
Publication year: 2014
Journal
Book Volume: 22
Pages Range: 17644-17656
Journal Issue: 15
DOI: 10.1364/OE.22.017644
Abstract
The spherical aberration generated when focusing from air into another medium limits the depth at which ultrafast laser machining can be accurately maintained. We investigate how the depth range may be extended using aberration correction via a liquid crystal spatial light modulator (SLM), in both single point and parallel multi-point fabrication in fused silica. At a moderate numerical aperture (NA = 0.5), high fidelity fabrication with a significant level of parallelisation is demonstrated at the working distance of the objective lens, corresponding to a depth in the glass of 2.4 mm. With a higher numerical aperture (NA = 0.75) objective lens, single point fabrication is demonstrated to a depth of 1 mm utilising the full NA, and deeper with reduced NA, while maintaining high repeatability. We present a complementary theoretical model that enables prediction of the effectiveness of SLM based correction for different aberration magnitudes. © 2014 Optical Society of America.
Authors with CRIS profile
Marcus Baum
Lehrstuhl für Photonische Technologien
Ilya Alexeev
Lehrstuhl für Photonische Technologien
Michael Schmidt
Lehrstuhl für Photonische Technologien
Additional Organisation(s)
Involved external institutions
United Kingdom (GB)How to cite
APA:
Salter, P.S., Baum, M., Alexeev, I., Schmidt, M., & Booth, M.J. (2014). Exploring the depth range for three-dimensional laser machining with aberration correction. Optics Express, 22(15), 17644-17656. https://dx.doi.org/10.1364/OE.22.017644
MLA:
Salter, P. S., et al. "Exploring the depth range for three-dimensional laser machining with aberration correction." Optics Express 22.15 (2014): 17644-17656.
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