Laser surface and subsurface modification of sapphire using femtosecond pulses
Eberle G, Schmidt M, Pude F, Wegener K (2016)
Publication Type: Journal article
Publication year: 2016
Journal
Book Volume: 378
Pages Range: 504-512
DOI: 10.1016/j.apsusc.2016.04.032
Abstract
Two methods to process sapphire using femtosecond laser pulses are demonstrated, namely ablation (surface), and in-volume laser modification followed by wet etching (subsurface). Firstly, the single and multipulse ablation threshold is determined and compared with previous literature results. A unique application of ablation is demonstrated by modifying the entrance aperture of water jet orifices. Laser ablation exhibits advantages in terms of geometric flexibility and resolution, however, defects in the form of edge outbreaks and poor surface quality are evident. Secondly, the role of material transformation, polarisation state and formation of multi-focus structures after in-volume laser modification is investigated in order to explain their influence during the wet etching process. Laser scanning and electron microscopy as well as electron backscatter diffraction measurements supported by ion beam polishing are used to better understand quality and laser-material interactions of the two demonstrated methods of processing.
Authors with CRIS profile
Additional Organisation(s)
Involved external institutions
Eidgenössische Technische Hochschule Zürich (ETHZ) / Swiss Federal Institute of Technology in Zurich
Switzerland (CH)
Inspire AG
Switzerland (CH)
Switzerland (CH)
Inspire AG
Switzerland (CH)
How to cite
APA:
Eberle, G., Schmidt, M., Pude, F., & Wegener, K. (2016). Laser surface and subsurface modification of sapphire using femtosecond pulses. Applied Surface Science, 378, 504-512. https://dx.doi.org/10.1016/j.apsusc.2016.04.032
MLA:
Eberle, G., et al. "Laser surface and subsurface modification of sapphire using femtosecond pulses." Applied Surface Science 378 (2016): 504-512.
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