Interferometric grazing incidence test of rough steep convex aspherics: full 3D reconstruction of the object

Rothau S, Schamburek T, Mantel K, Lindlein N (2022)

Publication Type: Journal article

Publication year: 2022

Journal

Applied Optics Optical Society of America

Book Volume: 61

Pages Range: 4246-4253

Journal Issue: 15

DOI: 10.1364/AO.455003

Abstract

A grazing incidence interferometric measurement procedure is applied to test rough convex steep rotationally symmetric aspherics. The measurement of rough surfaces is possible; i.e., without the need to polish the surfaces, due to the large effective wavelength (λeff = 10 µm) of the test. One measurement step using diffractive beam splitters and phase-shifting techniques delivers the surface information along one meridian. The full surface description can be stitched together from several phase results combined with appropriate object rotations. This publication includes, besides the short recapitulation of the measurement principle and experimental setup, a presentation of the simulated and measured data of an aspherical object under test. The data analysis of each meridian is focused on the elimination of the misalignment aberrations caused by specimen displacements. Finally, the stitching of multiple meridian regions to a 3D surface map of the specimen is shown.

Authors with CRIS profile

Sergej Rothau Institut für Optik, Information und Photonik Tobias Schamburek Lehrstuhl für Experimentalphysik (Optik) Norbert Lindlein Lehrstuhl für Experimentalphysik (Optik)

Involved external institutions

Max-Planck-Institut für die Physik des Lichts (MPL) / Max Planck Institute for the Science of Light

Germany (DE)

How to cite

APA:

Rothau, S., Schamburek, T., Mantel, K., & Lindlein, N. (2022). Interferometric grazing incidence test of rough steep convex aspherics: full 3D reconstruction of the object. Applied Optics, 61(15), 4246-4253. https://doi.org/10.1364/AO.455003

MLA:

Rothau, Sergey, et al. "Interferometric grazing incidence test of rough steep convex aspherics: full 3D reconstruction of the object." Applied Optics 61.15 (2022): 4246-4253.

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