Micromilling-assisted fabrication of monolithic polymer ridge-type waveguides with integrated photonic sensing structures
Kefer S, Pape D, Roth GL, Hessler S, Schmauß B, Hellmann R (2021)
Publication Type: Journal article
Publication year: 2021
Journal
Book Volume: 11
Pages Range: 2389-2400
Journal Issue: 8
DOI: 10.1364/OME.425778
Abstract
This study demonstrates and discusses a novel approach for the fabrication and rapid prototyping of monolithic photonic platforms comprising a ridge-type waveguide with integrated sensing structures. First, the bulk injection-molded cyclic olefin copolymer substrates are micromilled in order to define the physical extension of the ridge structure. Cross-sections down to 30 × 30 μm2, exhibiting a mean surface roughness of 300 nm, are achieved with this process. Subsequently, UV radiation is used to modify the ridge structure's refractive index, which leads to the formation of an optical waveguide. By employing a phase mask, it is possible to equip the photonic platform with a Bragg grating suitable for temperature measurements with a sensitivity of -5.1 pm K-1. Furthermore, an integrated Fabry-Pérot cavity, generated during the micromilling step as well, enables refractive index measurements with sensitivities up to 1154 nm RIU-1.
Authors with CRIS profile
Bernhard Schmauß
Professur für Hochfrequenztechnik mit dem Schwerpunkt Optische Hochfrequenztechnik und Photonik
Involved external institutions
Germany (DE)How to cite
APA:
Kefer, S., Pape, D., Roth, G.-L., Hessler, S., Schmauß, B., & Hellmann, R. (2021). Micromilling-assisted fabrication of monolithic polymer ridge-type waveguides with integrated photonic sensing structures. Optical Materials Express, 11(8), 2389-2400. https://dx.doi.org/10.1364/OME.425778
MLA:
Kefer, Stefan, et al. "Micromilling-assisted fabrication of monolithic polymer ridge-type waveguides with integrated photonic sensing structures." Optical Materials Express 11.8 (2021): 2389-2400.
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