Grazing incidence interferometry for testing rough aspherics: experimental results and data analysis

Rothau S, Mantel K, Lindlein N (2021)

Publication Type: Conference contribution

Publication year: 2021

Journal

Proceedings of SPIE Society of Photo-optical Instrumentation Engineers (SPIE)

Publisher: SPIE-INT SOC OPTICAL ENGINEERING

City/Town: BELLINGHAM

Conference Proceedings Title: OPTICS AND PHOTONICS FOR ADVANCED DIMENSIONAL METROLOGY

DOI: 10.1117/12.2555082

Authors with CRIS profile

Sergej Rothau Institut für Optik, Information und Photonik Norbert Lindlein Lehrstuhl für Experimentalphysik (Optik)

Involved external institutions

Max-Planck-Institut für die Physik des Lichts (MPL) / Max Planck Institute for the Science of Light DE Germany (DE)

How to cite

APA:

Rothau, S., Mantel, K., & Lindlein, N. (2021). Grazing incidence interferometry for testing rough aspherics: experimental results and data analysis. In OPTICS AND PHOTONICS FOR ADVANCED DIMENSIONAL METROLOGY. BELLINGHAM: SPIE-INT SOC OPTICAL ENGINEERING.

MLA:

Rothau, Sergey, K. Mantel, and Norbert Lindlein. "Grazing incidence interferometry for testing rough aspherics: experimental results and data analysis." Proceedings of the Conference on Optics and Photonics for Advanced Dimensional Metrology BELLINGHAM: SPIE-INT SOC OPTICAL ENGINEERING, 2021.

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