From Cyclopentasilane to Thin-Film Transistors

Gerwig M, Ali AS, Neubert D, Polster S, Bohme U, Franze G, Rosenkranz M, Popov A, Ponomarev I, Jank M, Viehweger C, Brendler E, Frey L, Kroll P, Kroke E (2021)

Publication Type: Journal article, Original article

Publication year: 2021

Journal

Advanced Electronic Materials Wiley

Book Volume: 7

Pages Range: 1-13

Article Number: 2000422

Journal Issue: 2

DOI: 10.1002/aelm.202000422

Open Access Link: https://onlinelibrary.wiley.com/doi/10.1002/aelm.202000422

Abstract

Cyclopentasilane (CPS) has been studied as an liquid precursor for the deposition of thin silicon films for printed electronics and related applications. The processing involves a UV-induced prepolymerization of CPS followed by liquid deposition and low-temperature thermolysis. An insight into the oligomer and polymer formation including crosslinking in solution using Si-29 NMR spectroscopy and electron spin resonance spectroscopy is reported. Formation of SiH (T-units) and SiH3 (M-units) is observed as well as short-lived paramagnetic species. Additionally, the polymerization is followed by Raman spectroscopy. Reactive molecular dynamics simulations are applied to develop a theoretical model for the CPS-ring-opening and crosslinking steps. The experimental and computational data correspond well to each other and allow insight into the mechanism of polymer formation. The processing steps include spin-coating, thermal drying, and conversion to amorphous silicon, H-passivation, and fabrication of a CPS-derived thin-film transistor (TFT), without intermediate silicon crystallization. Further improvement is gained by using tetralene as a solvent, leading to a reduction of the time-consuming polymerization step by one order of magnitude compared to cyclooctane. The overall quality and characteristics of the CPS-derived spin-coated silicon thin films correspond to standard plasma enhanced chemical vapor deposition-derived devices with respect to performance levels.

Authors with CRIS profile

Abid Shaukat Ali Lehrstuhl für Elektronische Bauelemente Sebastian Polster Lehrstuhl für Elektronische Bauelemente Michael Jank Lehrstuhl für Elektronische Bauelemente Lothar Frey Lehrstuhl für Elektronische Bauelemente

Related research project(s)

Liquid-phase processing of silicon thin films and electron devices based on polysilane precursors (FR 713/9-1) March 15, 2014 - March 14, 2017

Involved external institutions

Technische Universität Bergakademie Freiberg DE Germany (DE) University of Texas at Arlington (UTA) US United States (USA) (US) Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden e.V. (IFW) / Leibniz Institute for Solid State and Materials Research Dresden DE Germany (DE)

How to cite

APA:

Gerwig, M., Ali, A.S., Neubert, D., Polster, S., Bohme, U., Franze, G.,... Kroke, E. (2021). From Cyclopentasilane to Thin-Film Transistors. Advanced Electronic Materials, 7(2), 1-13. https://dx.doi.org/10.1002/aelm.202000422

MLA:

Gerwig, Maik, et al. "From Cyclopentasilane to Thin-Film Transistors." Advanced Electronic Materials 7.2 (2021): 1-13.

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