Interferometric grazing incidence test of rough steep convex spherics: Experimental data analysis
Rothau S, Mantel K, Lindlein N (2021)
Publication Type: Journal article, Original article
Publication year: 2021
Journal
Book Volume: 60
Pages Range: 52-59
Journal Issue: 1
DOI: 10.1364/AO.410071
Abstract
Grazing incidence interferometry has been applied to plane, cylindrical, acylindrical, and general rod-like surfaces using diffractive beam splitters. Here, in a first step towards measuring aspherics, we demonstrate that also rough convex steep rotationally symmetric spherics can be measured along one meridian in a single step using diffractive beam splitters and phase shifting techniques. The measurement of rough surfaces is possible, i.e., without the need to polish the surfaces, due to the large effective wavelength (λeff ≈ 10 µm) of the test. We include, besides the short recapitulation of the measurement principle and experimental setup, a presentation of the measured data of one small meridian region for the special case of spherical objects under test. The subsequent data analysis combined with suitable simulations focuses on elimination of the misalignment aberrations from the results caused by specimen displacements in the setup.
Authors with CRIS profile
Sergej Rothau
Institut für Optik, Information und Photonik
Norbert Lindlein
Lehrstuhl für Experimentalphysik
Related research project(s)
Involved external institutions
Germany (DE)How to cite
APA:
Rothau, S., Mantel, K., & Lindlein, N. (2021). Interferometric grazing incidence test of rough steep convex spherics: Experimental data analysis. Applied Optics, 60(1), 52-59. https://doi.org/10.1364/AO.410071
MLA:
Rothau, Sergey, K. Mantel, and Norbert Lindlein. "Interferometric grazing incidence test of rough steep convex spherics: Experimental data analysis." Applied Optics 60.1 (2021): 52-59.
BibTeX: Download