ENHANCED PIEZOELECTRIC AL(1-X)SC(X)N RF-MEMS RESONATORS FOR SUB-6 GHZ RF-FILTER APPLICATIONS: DESIGN, FABRICATION AND CHARACTERIZATION

Bogner A, Bauder R, Timme HJ, Forster T, Reccius C, Weigel R, Hagelauer A (2020)

Publication Type: Conference contribution

Publication year: 2020

Journal

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Publisher: IEEE

City/Town: NEW YORK

Pages Range: 1258-1261

Conference Proceedings Title: 2020 33RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2020)

Event location: Vancouver CA

Authors with CRIS profile

Andreas Bogner Lehrstuhl für Technische Elektronik Robert Weigel Lehrstuhl für Technische Elektronik Amelie Marietta Hagelauer

Involved external institutions

Infineon Technologies AG DE Germany (DE) Universität Bayreuth DE Germany (DE)

How to cite

APA:

Bogner, A., Bauder, R., Timme, H.-J., Forster, T., Reccius, C., Weigel, R., & Hagelauer, A. (2020). ENHANCED PIEZOELECTRIC AL(1-X)SC(X)N RF-MEMS RESONATORS FOR SUB-6 GHZ RF-FILTER APPLICATIONS: DESIGN, FABRICATION AND CHARACTERIZATION. In 2020 33RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2020) (pp. 1258-1261). Vancouver, CA: NEW YORK: IEEE.

MLA:

Bogner, Andreas, et al. "ENHANCED PIEZOELECTRIC AL(1-X)SC(X)N RF-MEMS RESONATORS FOR SUB-6 GHZ RF-FILTER APPLICATIONS: DESIGN, FABRICATION AND CHARACTERIZATION." Proceedings of the 33rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Vancouver NEW YORK: IEEE, 2020. 1258-1261.

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