Fast thickness gauging with an ECOPS-based terahertz time-domain system

Yahyapour M, Jahn A, Dutzi K, Puppe T, Leisching P, Schmauß B, Vieweg N, Deninger A (2020)


Publication Type: Conference contribution

Publication year: 2020

Journal

Publisher: SPIE

Book Volume: 11279

Conference Proceedings Title: Proceedings of SPIE - The International Society for Optical Engineering

Event location: San Francisco, CA US

ISBN: 9781510633216

DOI: 10.1117/12.2546020

Abstract

We employ thickness gauging with a fast terahertz time-domain spectroscopy (TDS) system based on electronically controlled optical sampling (ECOPS) and compare the results with those of a benchmark conventional terahertz TDS system and a mechanical micrometer gauge. The results of all technologies are in good agreement. We show that the ECOPS system is suitable for fast inline thickness measurements, owing to high measurement rate of 1600 traces per second. Moreover, we characterize the system with respect to signal quality. The time-domain dynamic range is ∼60 dB for a single-shot measurement, and ∼90 dB with 1000 trace averages, which are completed within less than a second (i.e., 0.625 seconds). The time-domain signal-to-noise ratio amounts to ∼50 dB and ∼80 dB for 1 and 1000 averages, respectively.

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How to cite

APA:

Yahyapour, M., Jahn, A., Dutzi, K., Puppe, T., Leisching, P., Schmauß, B.,... Deninger, A. (2020). Fast thickness gauging with an ECOPS-based terahertz time-domain system. In Laurence P. Sadwick, Tianxin Yang (Eds.), Proceedings of SPIE - The International Society for Optical Engineering. San Francisco, CA, US: SPIE.

MLA:

Yahyapour, M., et al. "Fast thickness gauging with an ECOPS-based terahertz time-domain system." Proceedings of the Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XIII 2020, San Francisco, CA Ed. Laurence P. Sadwick, Tianxin Yang, SPIE, 2020.

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