Electrical, optical and structural properties of Al-doped ZnO thin films grown on GaAs(111)B substrates by pulsed laser deposition

Weigand C, Crisp R, Ladam C, Furtak T, Collins R, Grepstad J, Weman H (2013)

Publication Status: Published

Publication Type: Journal article

Publication year: 2013

Journal

Thin Solid Films Elsevier

Publisher: ELSEVIER SCIENCE SA

Book Volume: 545

Pages Range: 124-129

DOI: 10.1016/j.tsf.2013.07.052

Abstract

We report on the characteristics of Al-doped ZnO thin films (AZO) grown on GaAs(111)B substrates using pulsed laser deposition. The influence of ambient gas composition, overall pressure, and growth temperature on the electrical, structural and optical properties of 100 nm-thin films grown from a ZnO target with 2 wt.% Al were investigated. Growth in a 1 Pa pure O-2 ambient was found to be superior to films grown in Ar ambient or vacuum with respect to their electrical properties. As-grown AZO films showed a low resistivity on the order of 10(-4) Omega cm. Post-deposition annealing in-situ showed no improvement of the transport properties, irrespective of annealing temperature and ambient gas. At high substrate temperatures, the interaction with the GaAs(111)B substrate seemed to affect the growth and conductivity of the AZO films. (C) 2013 Elsevier B. V. All rights reserved.

Authors with CRIS profile

Ryan Crisp Lehrstuhl für Chemistry of thin film materials

Involved external institutions

NTNU Trondheim - Norwegian University of Science and Technology NO Norway (NO) SINTEF NO Norway (NO) Colorado School of Mines US United States (USA) (US)

How to cite

APA:

Weigand, C., Crisp, R., Ladam, C., Furtak, T., Collins, R., Grepstad, J., & Weman, H. (2013). Electrical, optical and structural properties of Al-doped ZnO thin films grown on GaAs(111)B substrates by pulsed laser deposition. Thin Solid Films, 545, 124-129. https://dx.doi.org/10.1016/j.tsf.2013.07.052

MLA:

Weigand, Christian, et al. "Electrical, optical and structural properties of Al-doped ZnO thin films grown on GaAs(111)B substrates by pulsed laser deposition." Thin Solid Films 545 (2013): 124-129.

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