Evaluation of the optical performance of a novel high-speed focal-distance-modulated fibre-coupled confocal sensor
Gröschl AC, Schaude J, Hausotte T (2019)
Publication Type: Conference contribution
Publication year: 2019
Journal
Publisher: SPIE
Book Volume: 11056
Conference Proceedings Title: Proceedings of SPIE - The International Society for Optical Engineering
Event location: Munich
ISBN: 9781510627918
DOI: 10.1117/12.2526038
Abstract
This article presents the evaluation of the optical performance of a new high-frequency focal-distance-modulated confocal point sensor. While maintaining the known advantages of the confocal measurement principle, the sen- sor represents an innovative combination of a fibre-coupled confocal illumination and detection with a tuneable, acoustically driven gradient-index fluid lens (TAG lens) for the modulation of the focus distance and a novel signal processing utilizing a lock-in amplifier. The new arrangement is able to achieve an approximately linear characteristic curve for the optimised feedback control of nano coordinate measuring systems (CMS) in scanning sample mode. This article emphasises the implementation and use of the sensor in nano CMS (NMM-1) and the advantages of the new signal processing. Measurements on different resolution standards are conducted and compared with the focal-distance-modulated sensor and without focus-distance-modulation as conventional confocal microscope (CCM).
Authors with CRIS profile
Andreas Christian Gröschl
Lehrstuhl für Fertigungsmesstechnik
Janik Schaude
Lehrstuhl für Fertigungsmesstechnik
Tino Hausotte
Lehrstuhl für Fertigungsmesstechnik
Related research project(s)
How to cite
APA:
Gröschl, A.C., Schaude, J., & Hausotte, T. (2019). Evaluation of the optical performance of a novel high-speed focal-distance-modulated fibre-coupled confocal sensor. In Peter Lehmann, Wolfgang Osten, Armando Albertazzi Goncalves (Eds.), Proceedings of SPIE - The International Society for Optical Engineering. Munich, DE: SPIE.
MLA:
Gröschl, Andreas Christian, Janik Schaude, and Tino Hausotte. "Evaluation of the optical performance of a novel high-speed focal-distance-modulated fibre-coupled confocal sensor." Proceedings of the Optical Measurement Systems for Industrial Inspection XI 2019, Munich Ed. Peter Lehmann, Wolfgang Osten, Armando Albertazzi Goncalves, SPIE, 2019.
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