Grazing incidence interferometry for testing rough asperics

Rothau S, Schwider J, Mantel K, Lindlein N (2019)

Publication Type: Conference contribution

Publication year: 2019

Publisher: SPIE

Book Volume: 11056

Pages Range: 381 -- 394

Conference Proceedings Title: Optical Measurement Systems for Industrial Inspection XI

Event location: Munich

DOI: 10.1117/12.2525599

Authors with CRIS profile

Sergej Rothau Institut für Optik, Information und Photonik Johannes Schwider Naturwissenschaftliche Fakultät Norbert Lindlein Naturwissenschaftliche Fakultät

Related research project(s)

Interferometrische Prüfung von Asphären in streifender Inzidenz (GI) Aug. 1, 2018 - July 31, 2021

Involved external institutions

Max-Planck-Institut für die Physik des Lichts (MPL) / Max Planck Institute for the Science of Light DE Germany (DE)

How to cite

APA:

Rothau, S., Schwider, J., Mantel, K., & Lindlein, N. (2019). Grazing incidence interferometry for testing rough asperics. In Lehmann P, Osten W, Jr. AAG (Eds.), Optical Measurement Systems for Industrial Inspection XI (pp. 381 -- 394). Munich: SPIE.

MLA:

Rothau, Sergej, et al. "Grazing incidence interferometry for testing rough asperics." Proceedings of the SPIE, Munich Ed. Lehmann P, Osten W, Jr. AAG, SPIE, 2019. 381 -- 394.

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