Multifunctional micro-optical elements for laser beam homogenizing and beam shaping

Bich A, Rieck J, Dumouchel C, Roth S, Weible KJ, Eisner M, Voelkel R, Zimmermann M, Rank M, Schmidt M, Bitterli R, Ramanan N, Ruffieux P, Scharf T, Noell W, Herzig HP, De Rooij N (2008)

Publication Type: Conference contribution

Publication year: 2008

Journal

Proceedings of SPIE Society of Photo-optical Instrumentation Engineers (SPIE)

Publisher: SPIE

Book Volume: 6879

Conference Proceedings Title: Proc SPIE

Event location: San Jose, CA US

ISBN: 9780819470546

DOI: 10.1117/12.762923

Abstract

Refractive, diffractive and reflective micro-optical elements for laser beam shaping and homogenizing have been manufactured and tested. The presented multifunctional optical elements are used for shaping arbitrary laser beam profiles into a variety of geometries like, a homogeneous spot array or line pattern, a laser light sheet or flat-top intensity profiles. The resulting profiles are strongly influenced by the beam properties of the laser and by diffraction and interference effects at the micro-optical elements. We present general design rules for beam shaping and homogenizing. We demonstrate the application of such multifunctional micro-optical elements for a variety of applications from micro-laser machining to laser diagnostic systems.

Authors with CRIS profile

Michael Schmidt Lehrstuhl für Photonische Technologien

Additional Organisation(s)

Institute of Manufacturing Technology

Involved external institutions

SUSS MicroOptics SA CH Switzerland (CH) Université de Neuchâtel CH Switzerland (CH) Bayerisches Laserzentrum gemeinnützige Forschungsgesellschaft mbH (BLZ) DE Germany (DE)

How to cite

APA:

Bich, A., Rieck, J., Dumouchel, C., Roth, S., Weible, K.J., Eisner, M.,... De Rooij, N. (2008). Multifunctional micro-optical elements for laser beam homogenizing and beam shaping. In Proc SPIE. San Jose, CA, US: SPIE.

MLA:

Bich, A., et al. "Multifunctional micro-optical elements for laser beam homogenizing and beam shaping." Proceedings of the Proc SPIE, San Jose, CA SPIE, 2008.

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