The Application of Lasers in Micro Electronics Manufacturing

Fleckenstein M, Schmidt M, Eßer G (1998)

Publication Type: Conference contribution

Publication year: 1998

Publisher: CSI

Conference Proceedings Title: Chip Scale Review Magazine: Technical Proceedings and Presentations of the Chip Scale International (CSI) Europe 98

Event location: Weinheim

Authors with CRIS profile

Michael Schmidt Lehrstuhl für Photonische Technologien (LPT)

Additional Organisation(s)

Institute of Manufacturing Technology (LFT)

How to cite

APA:

Fleckenstein, M., Schmidt, M., & Eßer, G. (1998). The Application of Lasers in Micro Electronics Manufacturing. In Chip Scale Review Magazine: Technical Proceedings and Presentations of the Chip Scale International (CSI) Europe 98. Weinheim: CSI.

MLA:

Fleckenstein, Marc, Michael Schmidt, and Gerd Eßer. "The Application of Lasers in Micro Electronics Manufacturing." Proceedings of the Chip Scale Review Magazine: Technical Proceedings and Presentations of the Chip Scale International (CSI) Europe 98, Weinheim CSI, 1998.

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