Schmidt M, Eßer G (2003)
Publication Type: Conference contribution
Publication year: 2003
Book Volume: 5063
Pages Range: 163-171
Conference Proceedings Title: Proceedings of SPIE. Fourth International Symposium on Laser Precision Microfabrication
Journal Issue: 5063
DOI: 10.1117/12.540742
Micro technology is an application field, in which laser-based processes show a particularly high growth potential. New developments within the range of laser sources promote the laser application likewise, as the multiplicity of today already successfully realized applications. These encourage users ever more to focus on the tool called laser. With this contribution one tries to give an overview over developments and trends in the most important branches of laser beam micromachining. In detail semiconductor manufacturing, interconnect and micro mechanics are addressed. The contribution neither raises a claim on completeness, nor is to be given an absolutely measurable evaluation of the innovation value of interesting new developments. The goal of this contribution is to be a basis for a fruitful discussion between laser researchers, developers, users and manufacturers by supplying with information about activities in the field of micro technology.
APA:
Schmidt, M., & Eßer, G. (2003). Laser micro processing - facts and trends. In Miyamoto, I.; Ostendorf, A.; Sugioka, K.; Helvajian, H. (Eds.), Proceedings of SPIE. Fourth International Symposium on Laser Precision Microfabrication (pp. 163-171).
MLA:
Schmidt, Michael, and Gerd Eßer. "Laser micro processing - facts and trends." Proceedings of the SPIE. Fourth International Symposium on Laser Precision Microfabrication Ed. Miyamoto, I.; Ostendorf, A.; Sugioka, K.; Helvajian, H., 2003. 163-171.
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