Laser-adjustable actuators for high accuracy positioning of micro components

Schmidt M, Dirscherl M, Eßer G (2003)


Publication Type: Conference contribution

Publication year: 2003

Journal

Book Volume: 5063

Pages Range: 177-182

Conference Proceedings Title: Proceedings of SPIE. Fourth International Symposium on Laser Precision Microfabrication

Journal Issue: 5063

DOI: 10.1117/12.540461

Abstract

High-precision adjustment of smallest optical and electronic components is increasingly recognized as one of the key issues facing micromachining technology. As even narrow production tolerances for all individual parts are often not sufficient to match the tightly specified positioning accuracies of the complete assembly, in situ adjustment techniques are gaining more and more attention. Together with research partners from industry and science, the BLZ is developing a contact-free, laser-based adjustment method which allows high-accuracy adjustment of components mounted on specifically designed actuators. The underlying mechanisms do not depend on thermal effects but on selective laser ablation of prestressed layers of actuator substrate. This way, slightest deformations or modifications of particular mechanical properties can be initiated. The method promises to be more accurate and less time consuming than thermally induced laser bending.

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APA:

Schmidt, M., Dirscherl, M., & Eßer, G. (2003). Laser-adjustable actuators for high accuracy positioning of micro components. In Miyamoto, I.; Ostendorf, A.; Sugioka, K.; Helvajian, H. (Eds.), Proceedings of SPIE. Fourth International Symposium on Laser Precision Microfabrication (pp. 177-182).

MLA:

Schmidt, Michael, Manfred Dirscherl, and Gerd Eßer. "Laser-adjustable actuators for high accuracy positioning of micro components." Proceedings of the Proceedings of SPIE. Fourth International Symposium on Laser Precision Microfabrication Ed. Miyamoto, I.; Ostendorf, A.; Sugioka, K.; Helvajian, H., 2003. 177-182.

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