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Processing of Compounds and Silica-Layers with an Excimer-Laser-Processing Centre

Geiger M, Rebhan T, Lutz N, Hutfless J (1993)

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Publication Type: Conference contribution

Publication year: 1993

Conference Proceedings Title: Proceedings of the EUREKA 205 International Workshop Excimer Laser Applications

Event location: Erlangen

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How to cite

APA:

Geiger, M., Rebhan, T., Lutz, N., & Hutfless, J. (1993). Processing of Compounds and Silica-Layers with an Excimer-Laser-Processing Centre. In Proceedings of the EUREKA 205 International Workshop Excimer Laser Applications. Erlangen.

MLA:

Geiger, Manfred, et al. "Processing of Compounds and Silica-Layers with an Excimer-Laser-Processing Centre." Proceedings of the Proceedings of the EUREKA 205 International Workshop Excimer Laser Applications, Erlangen 1993.

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