Hildering S, Engel U, Merklein M (2011)
Publication Type: Journal article
Publication year: 2011
Publisher: None
Book Volume: 1353
Pages Range: 481-486
DOI: 10.1063/1.3589561
The trend towards miniaturisation of metallic mass production components combined with increased component functionality is still unbroken. Manufacturing these components by forming and blanking offers economical and ecological advantages combined with the needed accuracy. The complexity of producing tools with geometries below 50 μm by conventional manufacturing methods becomes disproportional higher. Expensive serial finishing operations are required to achieve an adequate surface roughness combined with accurate geometry details. A novel approach for producing such tools is the use of advanced etching technologies for monocrystalline silicon that are well-established in the microsystems technology. High-precision vertical geometries with a width down to 5 μm are possible. The present study shows a novel concept using this potential for the blanking of thin copper foils with monocrystallline silicon as a tool material. A self-contained machine-tool with compact outer dimensions was designed to avoid tensile stresses in the brittle silicon punch by an accurate, careful alignment of the punch, die and metal foil. A microscopic analysis of the monocrystalline silicon punch shows appropriate properties regarding flank angle, edge geometry and surface quality for the blanking process. Using a monocrystalline silicon punch with a width of 70 μm blanking experiments on as-rolled copper foils with a thickness of 20 μm demonstrate the general applicability of this material for micro production processes. © 2011 American Institute of Physics.
APA:
Hildering, S., Engel, U., & Merklein, M. (2011). Use of Monocrystalline Silicon as Tool Material for Highly Accurate Blanking of Thin Metal Foils. AIP Conference Proceedings, 1353, 481-486. https://dx.doi.org/10.1063/1.3589561
MLA:
Hildering, Sven, Ulf Engel, and Marion Merklein. "Use of Monocrystalline Silicon as Tool Material for Highly Accurate Blanking of Thin Metal Foils." AIP Conference Proceedings 1353 (2011): 481-486.
BibTeX: Download